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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,794 edits
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===Yield===
===Yield===
* Wafer maps of:
The yield is measured by inspecting all 116 lithographic resolution structures in an optical microscope and recording the smallest resolved dots and lines.
** Aligner: Maskless 02 (MLA2)
** Aligner: MA6-1
** Aligner: MA6-2 before service
** Aligner: MA6-2 after service + WEC pressure
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