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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,602 edits
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|- align="center"
|- align="center"
| Resolution: 1.17µm average; 0.2µm standard deviation. <br/>Yield at 1.25µm: 89% || Resolution: 3.77µm average; 0.7µm standard deviation. <br/>Yield at 2.5µm: 4% || Resolution: 4.19µm average; 0.7µm standard deviation. <br/>Yield at 2.5µm: 3%
| Hard contact <br/>Resolution: 1.17µm average; 0.2µm standard deviation. <br/>Yield at 1.25µm: 89% || Soft contact <br/>Resolution: 3.77µm average; 0.7µm standard deviation. <br/>Yield at 2.5µm: 4% || 10µm proximity <br/>Resolution: 4.19µm average; 0.7µm standard deviation. <br/>Yield at 2.5µm: 3%
|}
|}
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