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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,602 edits
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{| cellpadding="2" style="border: 2px solid darkgray;" align="center"
{| cellpadding="2" style="border: 2px solid darkgray;" align="center"
! width="420" |  
! width="460" |  
! width="420" |  
! width="460" |  
! width="420" |  
! width="460" |  


|+'''Wafer maps at optimal processing conditions for different aligners'''
|+'''Wafer maps at optimal processing conditions for different aligners'''
|- border="0" align="center"
|- border="0" align="center"
|[[Image:Map_MLA2_D90_F2.jpg|400px]]
|[[Image:Map_MLA2_D90_F2.jpg|450px]]
|[[Image:Map_MA6-2_vacuum.jpg|400px]]
|[[Image:Map_MA6-2_vacuum.jpg|450px]]
|[[Image:Map_MA6-1_vacuum.jpg|400px]]
|[[Image:Map_MA6-1_vacuum.jpg|450px]]


|- align="center"
|- align="center"
| Aligner: Maskless 02 (MLA2) (Dose 90mJ/cm<sup>2</sup>; defoc 2). <br/>Resolution: 1.22µm average; 0.1µm standard deviation. <br/>Yield at 1.25µm: 99% ||  Aligner: MA6-2 (Dose 100mJ/cm<sup>2</sup>; vacuum contact) <br/>Resolution: 1.02µm average; 0.1µm standard deviation. <br/>Yield at 1.25µm: 100% || Aligner: MA6-1 (Dose 100mJ/cm<sup>2</sup>; vacuum contact) <br/>Resolution: 1.30µm average; 0.2µm standard deviation. <br/>Yield at 1.25µm: 59%
| Aligner: Maskless 02 (MLA2) (Dose 90mJ/cm<sup>2</sup>; defoc 2). <br/>Resolution: 1.22µm average; 0.1µm standard deviation. <br/>Yield at 1.25µm: 99% ||  Aligner: MA6-2 (Dose 100mJ/cm<sup>2</sup>; vacuum contact). <br/>Resolution: 1.02µm average; 0.1µm standard deviation. <br/>Yield at 1.25µm: 100% || Aligner: MA6-1 (Dose 100mJ/cm<sup>2</sup>; vacuum contact). Probably over-exposed. <br/>Resolution: 1.30µm average; 0.2µm standard deviation. <br/>Yield at 1.25µm: 59%
|}
<br clear="all" />


{| cellpadding="2" style="border: 2px solid darkgray;" align="center"
! width="460" |
! width="460" |
! width="460" |
|+'''Wafer maps at different exposure modes for Aligner: MA6-2 (Dose 100mJ/cm<sup>2</sup>)'''
|- border="0" align="center"
|[[Image:Map_MA6-2_hard.jpg|450px]]
|[[Image:Map_MA6-2_soft_clean.jpg|450px]]
|[[Image:Map_MA6-2_prox.jpg|450px]]
|- align="center"
| Resolution: 1.17µm average; 0.2µm standard deviation. <br/>Yield at 1.25µm: 89% ||  Resolution: 3.77µm average; 0.7µm standard deviation. <br/>Yield at 2.5µm: 4% || Resolution: 4.19µm average; 0.7µm standard deviation. <br/>Yield at 2.5µm: 3%
|}
|}
<br clear="all" />
<br clear="all" />
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