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=Slides presented at NNUM 2026 in Uppsala=
=Slides presented at NNUM in Uppsala 2026=


=Additional information=
=Additional information=

Revision as of 11:25, 4 June 2026

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Slides presented at NNUM in Uppsala 2026

Additional information

Mask Aligner

Resolution

Linewidth

Sidewall angle

Maskless Aligner

Resolution

Linewidth

Sidewall angle