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Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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Wet etching of aluminium is done with two different solutions:
Wet etching of aluminium is done with two different solutions:


# H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
# H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub>  1:2 at 50 <sup>o</sup>C
# Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C
# Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C


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|'''Chemical solution'''
|'''Chemical solution'''
|H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2
|H<sub>2</sub>O:H<math>_3</sub>PO<sub>4</sub>  1:2
|PES 77-19-04  
|PES 77-19-04  
|-
|-
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|-
|-
|}
|}


== Dry Aluminium Etch ==
== Dry Aluminium Etch ==


Our [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] tool allows you to dry etch aluminium.
Our [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] tool allows you to dry etch aluminium.
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