Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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[[Category: Furnaces|A2]] | [[Category: Furnaces|A2]] | ||
==The Resist Pyrolysis furnace== | ==The Resist Pyrolysis furnace (from February 2024)== | ||
[[Image:ATV_ovn.jpg|thumb|365x365px|Resist Pyrosysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | [[Image:ATV_ovn.jpg|thumb|365x365px|Resist Pyrosysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | ||
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'''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=340 Furnace: Multipurpose annealing]''' | '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=340 Furnace: Multipurpose annealing]''' | ||
==Process information== | ==Process information== | ||