Specific Process Knowledge/Characterization/SEM Supra 2: Difference between revisions
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All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders. | All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders. | ||
The SEM is equipped with an Oxford Instruments EDX detector and | The SEM is equipped with an Oxford Instruments Aztec Advanced Ultim 65 mm2 SDD EDX detector and Aztec software. EDX (Energy dispersive X-ray) detection is used for element composition analysis in a small area. A specific training is needed for users that want to use the EDX detector. | ||
The SEM Supra 2 in located in the cleanroom. It was installed in December 2013. | The SEM Supra 2 in located in the cleanroom. It was installed in December 2013. | ||