Jump to content

Specific Process Knowledge/Etch/Etching of Chromium: Difference between revisions

← Older editNewer edit →
VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
Line 66: Line 66:
*Any size and number that can go inside the beaker in use
*Any size and number that can go inside the beaker in use
|
|
*smaller pieces on a carrier wafer
* 150 mm wafers
*<nowiki>#</nowiki>1 100mm wafers (when set up to 100mm wafers)
* Smaller wafers or pieces on a 150 mm carrier wafer
*<nowiki>#</nowiki>1 150mm wafers (when set up to 150mm wafers)
|
|
Smaller pieces glued to carrier wafer
Smaller pieces glued to carrier wafer
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/Etching_of_Chromium"