Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions
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==Disco Automatic dicing saw, model DAD321 | ==Disco Automatic dicing saw, model DAD321 and DAD3241== | ||
DTU nanolab has 2 saw available for dicing substrates into separate chips. Both tools offer versatile processing capabilities, high precision and reliability. | |||
The dicers at DTU Nanolab is placed in room 157 on the first floor in bldg. 346. Please notice that this is not | The dicers at DTU Nanolab is placed in room 157 on the first floor in bldg. 346. Please notice that this room is not under filter. Generally speaking the dicing process is very dirty, and you should expect particle contaminants on your device. | ||
[[File:IMG_20230228_112922.jpg|center|thumb||Dicers positioned on 1. floor bldg 346 room 157]] | |||
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[[ | In general it is ''not allowed'' to bring back your samples into the Cleanroom. You need approval from DTU Nanolab staff to do this, follow the instructions [[Specific Process Knowledge/Wafer cleaning/Bring samples into cleanroom|here]] to apply for approval. Your samples have to be thoroughly cleaned before entry, at a minimum a triton ultrasonic clean followed by a piranha clean. You will only be allowed to use a limited number of tools for the processing after dicing. | ||
Please consider your layout of dies on your wafer. The dicer can only cut straight lines across the | |||
===Dicing layout=== | |||
Please consider your layout of dies on your wafer. The dicer can only cut straight lines across the entire wafer. | |||
Please see the illustrations for a good and a bad design. | Please see the illustrations for a good and a bad design. | ||
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*[[Specific Process Knowledge/Back-end processing/Disco Saw#Comparing dicing parameters for different materials |Comparing dicing parameters for different materials]] | *[[Specific Process Knowledge/Back-end processing/Disco Saw#Comparing dicing parameters for different materials |Comparing dicing parameters for different materials]] | ||
*[[Specific Process Knowledge/Back-end processing/Disco Saw#Images of diced samples |Images of diced samples]] | <!--*[[Specific Process Knowledge/Back-end processing/Disco Saw#Images of diced samples |Images of diced samples]] | ||
*Dicing work sheet: [[Media:Dicing Work Sheet v2.docx |Dicing Work Sheet v2.docx]] Fill out before requesting dicing. | *Dicing work sheet: [[Media:Dicing Work Sheet v2.docx |Dicing Work Sheet v2.docx]] Fill out before requesting dicing. | ||