Specific Process Knowledge/Lithography/Development/manualTMAH developer: Difference between revisions
Appearance
| Line 93: | Line 93: | ||
|- | |- | ||
! scope=row style="text-align: left;" | Developer | ! scope=row style="text-align: left;" | Developer | ||
| | | AZ 726 MIF (2.38% TMAH) | ||
AZ 726 MIF (2.38% TMAH) | |||
|- | |- | ||
! scope=row style="text-align: left;" | Development method | ! scope=row style="text-align: left;" | Development method | ||