Specific Process Knowledge/Lithography/Strip/plasmaAsher03: Difference between revisions
Created page with "=Plasma Asher 3: Descum= 400px|thumb|Plasma Asher 3: Descum is a low power plasma asher dedicated for descumming on smaller substrates. Product name: Diener Pico Plasma Asher<br> Year of purchase: 2014 The Plasma Asher 3: Descum is dedicated for resist descum, i.e. removal of remains resist traces after development. It has a small chamber, so you can only load a single 100 mm substrate, or a few smaller pieces. In this machine, only Ox..." |
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The user manual, user APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=423 LabManager] - '''requires login''' | The user manual, user APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=423 LabManager] - '''requires login''' | ||
==Process Information== | |||
Detailed information about descum processing on Plasma asher 3: Descum can be found [[Specific Process Knowledge/Lithography/Descum|here]]. | Detailed information about descum processing on Plasma asher 3: Descum can be found [[Specific Process Knowledge/Lithography/Descum|here]]. | ||
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