Specific Process Knowledge/Lithography/Development/manualEbeam developer: Difference between revisions
Created page with "==Developer: E-beam 02== 400px|right|thumb|Developer: E-beam 02 is located in E-4. Developer: E-beam 02 is a manually operated, single substrate puddle developer. It uses the ZED-N50 or AR 600-50 developers and IPA for rinsing. The substrates are loaded manually one by one into the developer. Developer dispense, puddle time, IPA rinse, and drying is then performed automatically by the equipment. '''[https://www.youtube.com/watch?v=btinNzYnLnY Tra..." |
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=Developer: E-beam 02= | |||
[[Image:IMG 2464.JPG|400px|right|thumb|Developer: E-beam 02 is located in E-4.]] | [[Image:IMG 2464.JPG|400px|right|thumb|Developer: E-beam 02 is located in E-4.]] | ||
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The user manual, user APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager] - '''requires login''' | The user manual, user APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager] - '''requires login''' | ||
=Process information= | |||
All recipes use the following structure: | All recipes use the following structure: | ||
#Pressurize the developer canister | #Pressurize the developer canister | ||
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*21 A 5x60 | *21 A 5x60 | ||
=Equipment performance and process related parameters= | |||
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;" | {|border="1" cellspacing="1" cellpadding="10" style="text-align:left;" | ||
