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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 427: Line 427:
(4 alignment marks)
(4 alignment marks)
|'''X'''
|'''X'''
|rowspan="2" align="center"|1: 0; 0<br>2: -37500; 0<br>3: 37500; 0<br>4: 0; 35000<br>5: 0; -35000
|rowspan="2" align="center"|1: -37500; 0<br>2: 37500; 0<br>3: 0; 35000<br>4: 0; -35000
|rowspan="2" align="center"|-16.298
|rowspan="2" align="center"|-16.298
| 0.999978
| 0.999978