Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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| Line 427: | Line 427: | ||
(4 alignment marks) | (4 alignment marks) | ||
|'''X''' | |'''X''' | ||
|rowspan="2" align="center"|1: | |rowspan="2" align="center"|1: -37500; 0<br>2: 37500; 0<br>3: 0; 35000<br>4: 0; -35000 | ||
|rowspan="2" align="center"|-16.298 | |rowspan="2" align="center"|-16.298 | ||
| 0.999978 | | 0.999978 | ||