Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 206: | Line 206: | ||
| -0.31 | | -0.31 | ||
| ±1.30 | | ±1.30 | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|2 alignment marks | |||
(on X-axis) | |||
|'''X''' | |||
|rowspan="2" align="center"|1: -37500; 0<br>2: 37500; 0 | |||
|rowspan="2" align="center"|0.003 | |||
| - | |||
|rowspan="2" align="center"| - | |||
| 0.01 | |||
| ±0.15 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| - | |||
| -0.26 | |||
| ±0.20 | |||
|- | |- | ||