Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 161: | Line 161: | ||
!colspan="2"|MLA1-MLA1 | !colspan="2"|MLA1-MLA1 | ||
!Mark positions | !Mark positions | ||
!Scaling [ | !Rotation [mRad] | ||
!Scaling [a.u.] | |||
!Shearing [mRad] | !Shearing [mRad] | ||
!Average error [µm] | !Average error [µm] | ||
| Line 172: | Line 173: | ||
(stage accuracy test) | (stage accuracy test) | ||
|'''X''' | |'''X''' | ||
|rowspan="2" align="center"| - | |||
|rowspan="2" align="center"| - | |rowspan="2" align="center"| - | ||
| - | | - | ||
| Line 184: | Line 186: | ||
| 0.10 | | 0.10 | ||
| ±0.225 | | ±0.225 | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|4 alignment marks | |||
(like QC) | |||
|'''X''' | |||
|rowspan="2" align="center"|1: -37500; 0<br>2: 37500; 0<br>3: 0; -35000<br>4: 0; 35000 | |||
|rowspan="2" align="center"|0.000 | |||
| 1.000001 | |||
|rowspan="2" align="center"|0.0002 | |||
| 0.06 | |||
| ±0.05 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| 0.999960 | |||
| -0.31 | |||
| ±1.30 | |||
|- | |- | ||
| Line 191: | Line 212: | ||
|'''X''' | |'''X''' | ||
|rowspan="2" align="center"|positions | |rowspan="2" align="center"|positions | ||
|rowspan="2" align="center"|rotation | |||
| x scaling | | x scaling | ||
|rowspan="2" align="center"|shearing | |rowspan="2" align="center"|shearing | ||
| Line 211: | Line 233: | ||
|- | |- | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!colspan="2"| | !colspan="2"|MLA1-MLA1 | ||
!Mark positions | !Mark positions | ||
!Scaling [ | !Rotation [mRad] | ||
!Scaling [a.u.] | |||
!Shearing [mRad] | !Shearing [mRad] | ||
!Average error [µm] | !Average error [µm] | ||
| Line 225: | Line 248: | ||
|'''X''' | |'''X''' | ||
|rowspan="2" align="center"|positions | |rowspan="2" align="center"|positions | ||
|rowspan="2" align="center"|rotation | |||
| x scaling | | x scaling | ||
|rowspan="2" align="center"|shearing | |rowspan="2" align="center"|shearing | ||
| Line 239: | Line 263: | ||
|} | |} | ||
OLD TEXT: | |||
In the overlay test, two alignment accuracies are assessed: The machine-to-self overlay accuracy (MLA-MLA), and the machine-to-machine (MA6-MLA) overlay accuracy. Because alignment is possible using two marks or four marks, both are tested in each case. Exposing the first print with or without flat alignment was also tested, but no significant effect was observed. | In the overlay test, two alignment accuracies are assessed: The machine-to-self overlay accuracy (MLA-MLA), and the machine-to-machine (MA6-MLA) overlay accuracy. Because alignment is possible using two marks or four marks, both are tested in each case. Exposing the first print with or without flat alignment was also tested, but no significant effect was observed. | ||