Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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	Ething of ~~CLuminium~~ can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/ICP Metal Etcher\|ICP]] using Chlorine chemistry or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions.		Ething of Aluminium can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/ICP Metal Etcher\|ICP]] using Chlorine chemistry or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions.