Specific Process Knowledge/Characterization/XRD/SLSII analysis: Difference between revisions
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==HRXRD== | ==HRXRD== | ||
The HRXRD package is used | The HRXRD package is used with rocking curves and reciprocal space mapping data to derive information about crystallinity, strain, composition, and thickness. These measurements are usually made on epitaxial layers and single-crystal substrates. Like the XRR plugin, the flow is to load data, generate a model of the layers, simulate initial parameters, and finally fit the model to the data. | ||
===Rocking | ===Rocking Curves=== | ||
Three modes are available for Rocking Curve analysis: Evaluation and Fit, Evaluation, or Fit. The procedure differs only slightly from one to the other | Three modes are available for Rocking Curve analysis: ''Evaluation and Fit'', ''Evaluation'', or ''Fit''. The procedure differs only slightly from one to the other. | ||
'''How to analyze Rocking Curves:''' | |||
# Load data: | |||
# Configure sample model: | |||
##Set substrate material and initial values. | |||
##Add layers. Consider adding interface layers like native oxides. | |||
##Set layer materials and initial values. | |||
##Define Graded Layers if any. | |||
##Define Super Lattices if any. | |||
##Link layers (formula is of the type th[1], for linking thickness to layer L1)). | |||
#Set peak parameters and Evaluate: | |||
##Associate peaks with layers or substrate. | |||
##Select if the peak is a Bragg Peak or a Harmonic peak. | |||
##For Harmonic peaks chose the harmonic order. | |||
##When done press Evaluate to update fitting parameters. | |||
#Set X-ray parameters: | |||
##Check values for wavelength and reflection. | |||
#Set simulation parameters: | |||
##Select the scan type and the range for simulation. | |||
##Click Auto in Horizontal transform to align the offset in 2θ. | |||
##In Vertical transform, chose the background type and click auto to add a background function to the simulation. | |||
##Optional add the some of the values as fitting parameters. | |||
#Set fit algorithm and run tit | |||
##Select the Fit method. Genetic Algorithm is for global optimization, while the two others are local optimizations. | |||
##Change fit method parameters and settings as needed. | |||
##If wanted set an instrumental function in the tab below the fit parameters window. | |||
===Reciprocal Space Mapping=== | ===Reciprocal Space Mapping=== | ||
For RSM data analysis use the RSM flow in the HRXDR plugin. | For RSM data analysis use the RSM flow in the HRXDR plugin. | ||
'''How to fit RSM data:''' | |||
#Load data: | |||
##On the chart toolbar, plot options can be change, of note it is possible to change between angular and reciprocal space coordinates. | |||
#Smoothing and background subtraction: | |||
##The data can be smoothed, by weighted average of nearby neighbors. | |||
##Background subtraction either in the form of a fitted background or a constant value is possible. | |||
#Search peaks | |||
##Chose the settings for peak search. | |||
##Verify the Peaks for Evaluation list. | |||
#Configure sample model: | |||
##Set substrate material and initial values. | |||
##Add layers. Consider adding interface layers like native oxides. | |||
##Set layer materials and initial values. | |||
##Define Graded Layers if any. | |||
##Define Super Lattices if any. | |||
##Link layers, formula is of the type th[1], for linking thickness to layer L1. | |||
#Generate hkl: | |||
##Set the rotation angle, ϕ, of the substrate. | |||
##Set the tilt of the substrate, χ, for an in-plane measurement, it is called 2θχ. | |||
##Adjust the other parameters as wanted. | |||
For more information on how to use the HRXRD plugin, read the manual by clicking on the ? in the software or | ##Press "generate hkl". | ||
For more information on how to use the HRXRD plugin, read the manual by clicking on the ? in the software or find it in [http://labmanager.dtu.dk/view_binary.php?fileId=4242 LabManager] - requires login. | |||
===RS viewer=== | ===RS viewer=== | ||