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Specific Process Knowledge/Characterization/XRD/SLSII analysis: Difference between revisions

Reet (talk | contribs)
Reet (talk | contribs)
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#Set fit algorithm and run fit
#Set fit algorithm and run fit
##Select the Fit method: Genetic Algorithm is for global optimization, while the two others are local optimizations.
##Select the Fit method: Genetic Algorithm is for global optimization, while the two others are local optimizations.
##Change fit method parameters and settings as needed. ''E.g., in the genetic algorithm it's often a good idea to use 10 times more individuals than the default (to 500) and set the Chi2 value a factor of 10 lower to E-5.
##Change fit method parameters and settings as needed. ''E.g., in the genetic algorithm it's often a good idea to use 10 times more individuals than the default (500 instead of 0) and set the Chi2 value a factor of 10 lower to E-5.
''##(Optional) Set an instrumental function in the tab below the fit parameters window.
##(Optional) Set an instrumental function in the tab below the fit parameters window.


It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist told us that the value of the thickness should be accurate within 1 nm, as it is mostly based on the oscillation frequency, which is relatively simple to fit. The accuracy of the thickness determination probably decreases, however, if there are many layers or graded layers, although those can be included in the fit.
It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist told us that the value of the thickness should be accurate within 1 nm, as it is mostly based on the oscillation frequency, which is relatively simple to fit. The accuracy of the thickness determination probably decreases, however, if there are many layers or graded layers, although those can be included in the fit.