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Specific Process Knowledge/Characterization/XRD/SLSII analysis: Difference between revisions

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Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,745 edits
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##Check the Horizontal axis angles, to exclude the noise tail from the fit.
##Check the Horizontal axis angles, to exclude the noise tail from the fit.
##Consider to auto transform the Horizontal and Vertical axes.
##Consider to auto transform the Horizontal and Vertical axes.
#Set fit algorithm and Run Fit
#Set fit algorithm and run fit
##Select the Fit method, Generic Algorithm is for global optimization, while the two others are local optimizations.
##Select the Fit method: Genetic Algorithm is for global optimization, while the two others are local optimizations.
##Change fit method parameters and settings as needed.
##Change fit method parameters and settings as needed.
###In genetic algorithm it's often a good idea to use 10 times more individuals than the default (to 500) and set the Chi2 value a factor of 10 lower to E-5.
##(Optional) Set an instrumental function in the tab below the fit parameters window.
##(Optional) Set an instrumental function in the tab below the fit parameters window.


It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist told us that the value of the thickness should be accurate within 1 nm, as it is mostly based on the oscillation frequency, which is relatively simple to fit. The accuracy of the thickness determination probably decreases, however, if there are many layers or graded layers, although those can be included in the fit.
It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist told us that the value of the thickness should be accurate within 1 nm, as it is mostly based on the oscillation frequency, which is relatively simple to fit. The accuracy of the thickness determination probably decreases, however, if there are many layers or graded layers, although those can be included in the fit.


For more information on how to use the XRR plugin, read the manual by clicking on the ? in the software or from [http://labmanager.dtu.dk/view_binary.php?fileId=4243 LabManager]  - requires login.
For more information on how to use the XRR plugin, read the manual by clicking on the ? in the software or find it here in [http://labmanager.dtu.dk/view_binary.php?fileId=4243 LabManager]  - requires login.


==HRXRD==
==HRXRD==
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