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'''How to analyze XRR data:'''
'''How to analyze XRR data:'''
# Load data:
# Load data:
# Configure sample model:
# Configure sample model:
**Set substrate material and initial values.
##Set substrate material and initial values.
**Add layers. Consider adding interface layers like native oxides.
##Add layers. Consider adding interface layers like native oxides.
**Set layer materials and initial values.
##Set layer materials and initial values.
**Define Graded Layers if any.
##Define Graded Layers if any.
**Define Super Lattices if any.
##Define Super Lattices if any.
**Link layers, formula is of the type th[1], for linking thickness to layer L1.
##Link layers (formula is of the type th[1] for linking thickness to layer L1).
 
# Oscillation analysis (optional):
# Oscillation analysis (optional):
**Run Analysis.
##Run Analysis.
**Look over the list of Residual oscillation components.
##Look over the list of Residual oscillation components.
**Check if the number of layers and the thickness are as expected.
##Check if the number of layers and the thickness are as expected.
**If acceptable, Optimize and Apply Sample.
##If acceptable, Optimize and Apply Sample.
 
#Set simulation parameters.
#Set simulation parameters.
**Check the Horizontal axis angles, to exclude the noise tail from the fit.
##Check the Horizontal axis angles, to exclude the noise tail from the fit.
**Consider to auto transform the Horizontal and Vertical axes.
##Consider to auto transform the Horizontal and Vertical axes.
*Set fit algorithm and Run Fit
#Set fit algorithm and Run Fit
**Select the Fit method, Generic Algorithm is for global optimization, while the two others are local optimizations.
##Select the Fit method, Generic Algorithm is for global optimization, while the two others are local optimizations.
**Change fit method parameters and settings as needed.
##Change fit method parameters and settings as needed.
**If wanted set an instrumental function in the tab below the fit parameters window.
##(Optional) Set an instrumental function in the tab below the fit parameters window.


It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist told us that the value of the thickness should be accurate within 1 nm, as it is mostly based on the oscillation frequency, which is relatively simple to fit. The accuracy of the thickness determination probably decreases, however, if there are many layers or graded layers, although those can be included in the fit.
It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist told us that the value of the thickness should be accurate within 1 nm, as it is mostly based on the oscillation frequency, which is relatively simple to fit. The accuracy of the thickness determination probably decreases, however, if there are many layers or graded layers, although those can be included in the fit.
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