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==XRR==
==XRR==


Gaining information about thin films with X-Ray Reflectivity, does like ellipsometry require some prior knowledge of the sample. In SLSII you create a layer structure with initial parameters. Then the software will fit the generated model to obtain the thickness, roughness, and density of your layers.
X-Ray Reflectivity, like ellipsometry, requires some prior knowledge of the sample for proper fitting of the data. In SLSII you create a layer structure with initial parameters. Then the software will generate and fit a model to obtain the thickness, roughness, and density of your layers.
*Load data:
 
*Configure sample model:
'''How to analyze XRR data:'''
# Load data:
 
# Configure sample model:
**Set substrate material and initial values.
**Set substrate material and initial values.
**Add layers. Consider adding interface layers like native oxides.
**Add layers. Consider adding interface layers like native oxides.
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**Define Super Lattices if any.
**Define Super Lattices if any.
**Link layers, formula is of the type th[1], for linking thickness to layer L1.
**Link layers, formula is of the type th[1], for linking thickness to layer L1.
*Oscillation analysis (optional):
 
# Oscillation analysis (optional):
**Run Analysis.
**Run Analysis.
**Look over the list of Residual oscillation components.
**Look over the list of Residual oscillation components.
**Check if the number of layers and the thickness are as expected.
**Check if the number of layers and the thickness are as expected.
**If acceptable, Optimize and Apply Sample.
**If acceptable, Optimize and Apply Sample.
*Set simulation parameters.
 
#Set simulation parameters.
**Check the Horizontal axis angles, to exclude the noise tail from the fit.
**Check the Horizontal axis angles, to exclude the noise tail from the fit.
**Consider to auto transform the Horizontal and Vertical axes.
**Consider to auto transform the Horizontal and Vertical axes.
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**If wanted set an instrumental function in the tab below the fit parameters window.
**If wanted set an instrumental function in the tab below the fit parameters window.


It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist has told us that the thickness if measuring just a single layer or a few layers should be accurate within 1 nm, as it is mostly based on the oscillation frequency, so relatively simple to fit.  
It is not easy to evaluate the accuracy of the fit. However, a Rigaku specialist told us that the value of the thickness should be accurate within 1 nm, as it is mostly based on the oscillation frequency, which is relatively simple to fit. The accuracy of the thickness determination probably decreases, however, if there are many layers or graded layers, although those can be included in the fit.


For more information on how to use the XRR plugin, read the manual by clicking on the ? in the software or from [http://labmanager.dtu.dk/view_binary.php?fileId=4243 LabManager]  - requires login.
For more information on how to use the XRR plugin, read the manual by clicking on the ? in the software or from [http://labmanager.dtu.dk/view_binary.php?fileId=4243 LabManager]  - requires login.
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