Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A2 furnace break-down voltage measurement results: Difference between revisions
Created page with "==Breakdown voltage results for the A2 Gate Oxide furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''February 2022''' |DRY1050 |150 nm |350x350px|thumb|left |image:2022-02-08_10-56-57_Wafer_A2_150nm_Rel.png|350x350px|thumb|le..." |
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|'''Absolute break-down voltage''' | |'''Absolute break-down voltage''' | ||
|'''Relative break-down voltage''' | |'''Relative break-down voltage''' | ||
<i>= Absolute break-down voltage/oxide thickness<i> | |||
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|'''February 2022''' | |'''February 2022''' | ||
Revision as of 12:41, 16 September 2025
Breakdown voltage results for the A2 Gate Oxide furnace
Dry oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| February 2022 | DRY1050 | 150 nm |  |
 |
| November 2023 | DRY1100 | 585 nm |  |
 |
| January 2024 | DRY1050 | 226 nm |  |