Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Spincoater: Gamma ebeam & UV:<br /> | Spincoater: Gamma ebeam & UV:<br /> https://labmanager.dtu.dk/view_binary.php?fileId=4431 | ||
Spincoater: Gamma UV:<br /> | Spincoater: Gamma UV:<br /> https://labmanager.dtu.dk/view_binary.php?fileId=4432 | ||
Developer: TMAH UV-lithography:<br /> | Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?fileId=4434 | ||
Spincoater: Süss stepper:<br /> | Spincoater: Süss stepper:<br /> https://labmanager.dtu.dk/view_binary.php?fileId=4433 | ||
Developer: Stepper:<br /> http://labmanager.dtu.dk/view_binary.php?fileId=4435 | Developer: Stepper:<br /> http://labmanager.dtu.dk/view_binary.php?fileId=4435 | ||