Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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Ething of CLuminium can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP]] using Chlorine chemistry or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300|IBE]] by sputtering with Ar ions. | |||
==Wet Aluminium Etch== | ==Wet Aluminium Etch== | ||
[[Image:Wet_Al_etch.jpg|300x300px|thumb|Wet Aluminium Etch: Positioned in cleanroom 4]] | [[Image:Wet_Al_etch.jpg|300x300px|thumb|Wet Aluminium Etch: Positioned in cleanroom 4]] | ||