Specific Process Knowledge/Thermal Process: Difference between revisions
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*[[/Furnace APOX|Furnace APOX]] - ''Furnace for growing very thick oxide'' | *[[/Furnace APOX|Furnace APOX]] - ''Furnace for growing very thick oxide'' | ||
*[[/Jipelec RTP|Jipelec RTP]] - ''For Rapid Thermal Anneal of III-V materials and Silicon based material'' | *[[/Jipelec RTP|Jipelec RTP]] - ''For Rapid Thermal Anneal of III-V materials and Silicon based material'' | ||
*[[/BCB Curing Oven|BCB Curing Oven]] - ''...'' | |||
*[[/Resist Pyrolysis Furnace|Resist Pyrolysis Furnace]] - ''...'' | |||