Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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 === How to read the SPTS notation on process recipes ===
-Two words about the SPTS short hand notation on process recipes: When, take for instance the etch cycle from step 1 in Process A below, it is written Platen power 120 >> 140 (1.5s) 45 it is to be interpreted as:
+To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of step1 of the Process A described below:
-# In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end
+# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as:
-# During the reminder of  the cycle the platen power is kept constant at 45 W.
+## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end
+## During the reminder of  the cycle the platen power is kept constant at 45 W.
+# The Temperature has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as:
 === Process A ===