Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
Appearance
| Line 89: | Line 89: | ||
=== Sloped sidewalls === | === Sloped sidewalls === | ||
For injection molding purposes | For injection molding purposes | ||
== Processing challenges == | |||
=== Bonded wafers === | |||
== User manuals == | == User manuals == | ||