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Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch: Difference between revisions

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New page: {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''SOI etch specifications''' |- ! Parameter ! Specification ! Average result |- ! Etch rate (µm/min) | > 10...
 
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Bureaucrats, danchip, Administrators
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{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''Process B recipe'''
|+ '''SOI etch recipe'''
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