Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch|SOI etch: Recipe, specifications and results]] | [[Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch|SOI etch: Recipe, specifications and results]] | ||
== Nanoetching == | == Other processes == | ||
=== Nanoetching === | |||
[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]] | [[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]] | ||
=== Wafer thinning === | |||
=== Sloped sidewalls === | |||
For injection molding purposes | |||
== User manuals == | == User manuals == | ||