Specific Process Knowledge/Etch/DRIE-Pegasus/processD: Difference between revisions
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| colspan="2" | Temperature 0 degs, HBC 10 torr, Long funnel, with baffle & 100 mm spacers | | colspan="2" | Temperature 0 degs, HBC 10 torr, Long funnel, with baffle & 100 mm spacers | ||
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See results in the acceptance report: [[Media:Pegasus_AcceptanceTest.pdf|here]]. | |||