Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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== Process information == | == Process information == | ||
[[/Acceptance Test|Acceptance Test information is found here]]. Describes '''thickness uniformity''' | [[/Acceptance Test|Acceptance Test information is found here]]. Describes tests of '''thickness uniformity''', '''side wall deposition''', '''sheet resistance''', and '''use of the ion source'''. | ||
===Materials available in the E-beam evaporator (Temescal)=== | ===Materials available in the E-beam evaporator (Temescal)=== | ||