Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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[[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]]<br> | [[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]]<br> | ||
If your favorite metal is not on the list you are welcome to ask if we can develop a recipe. Note that Si as well as SiO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub> and other oxides are available on the [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator| | If your favorite metal is not on the list you are welcome to ask if we can develop a recipe. Note that Si as well as SiO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub> and other oxides are available on the [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator|E-beam Evaporator (10-pockets)]]. | ||
===Thickness measurement, deposition rate and process control=== | ===Thickness measurement, deposition rate and process control=== | ||