Specific Process Knowledge/Etch/III-V RIE: Difference between revisions
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'''''Unless otherwise stated, this page is written by DTU Nanolab internal''''' | '''''Unless otherwise stated, this page is written by DTU Nanolab internal''''' | ||
<blockquote>This tool is expected to be decommissioned soon - please ask the dryetch group for alternatives.</blockquote> | |||
==III-V RIE Plassys== | ==III-V RIE Plassys== | ||