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| === Process A === | | === Process A === |
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| Process A is labelled ''Large trench (80μm wide) 150μm depth''. In the acceptance test the process was run on a 150 mm wafer with 12-13 % etch load. The tables below show | | Process A is labelled ''Large trench (80μm wide) 150μm depth''. In the acceptance test the process was run on a 150 mm wafer with 12-13 % etch load. |
| * The specifications and the results achieved
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| * The recipe
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| {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
| | [[Specific Process Knowledge/Etch/DRIE-Pegasus/processA|Process A: Recipe, specifications and results]] |
| |+ '''Process A specifications'''
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| |-
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| ! Parameter
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| ! Specification
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| ! Average result
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| |-
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| ! Etch rate (µm/min)
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| | > 15
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| | 18.9
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| |-
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| ! Etched depth (µm)
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| | 150
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| | 189.1
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| |-
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| ! Scallop size (nm)
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| | < 800
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| | 718
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| |-
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| ! Profile (degs)
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| | 91 +/- 1
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| | 91.1
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| |-
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| ! Selectivity to AZ photoresist
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| | > 150
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| | 310
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| |-
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| ! Undercut (µm)
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| | <1.5
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| | 0.84
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| |-
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| ! Uniformity (%)
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| | < 3.5
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| | 3.0
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| |-
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| ! Repeatability (%)
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| | <4
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| | 0.43
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| |-
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| |}
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| {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
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| |+ '''Process A recipe'''
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| |-
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| !
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| ! colspan="2" | Step 1
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| ! colspan="2" | Step 2
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| |-
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| ! width="120" | Parameter
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| ! width="120" | Etch
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| ! width="120" | Dep
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| ! width="120" | Etch
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| ! width="120" | Dep
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| |-
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| ! Gas flow (sccm)
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| | SF<sub>6</sub> 350 (1.5 s) 550
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| | C<sub>4</sub>F<sub>8</sub> 200
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| | SF<sub>6</sub> 350 (1.5 s) 550
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| | C<sub>4</sub>F<sub>8</sub> 200
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| |-
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| ! Cycle time (secs)
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| | 7.0
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| | 4.0
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| | 7.0
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| | 4.0
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| |-
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| ! Pressure (mtorr)
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| | 25 (1.5 s) 90 >> 150
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| | 25
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| | 25 (1.5 s) 150
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| | 25
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| |-
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| ! Coil power (W)
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| | 2800
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| | 2000
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| | 2800
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| | 2000
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| |-
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| ! Platen power (W)
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| | 120 >> 140 (1.5) 45
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| | 0
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| | 140 (1.5) 45
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| | 0
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| |-
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| ! Cycles
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| | colspan="2" | 11 (keep fixed)
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| | colspan="2" | 44 (vary this)
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| |-
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| ! Common
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| | colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
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| |}
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| == Nanoetching == | | == Nanoetching == |
