Specific Process Knowledge/Thermal Process/E1 Furnace Oxidation (8"): Difference between revisions
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*N<sub>2</sub>: 0 - 30 slm | *N<sub>2</sub>: 0 - 30 slm | ||
*O<sub>2</sub>: 0 - 30 slm | *O<sub>2</sub>: 0 - 30 slm | ||
*Steamer flow : 0 - 12.5 slm (9.5 slm in standard recipes) | *Steamer flow: 0 - 12.5 slm (9.5 slm in standard recipes) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||