Specific Process Knowledge/Etch/Wet Silicon Nitride Etch: Difference between revisions
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[[ | [[Category:Equipment|Etch Wet silicon nitride]] | ||
[[ | [[Category:Etch (Wet) bath|Silicon Nitride]] | ||
[[Image:Nitrideetch.JPG|300x300px|thumb|The 'Nitride etch' bath is placed inside 'Wet bench 02: Nitride ethc' in Cleanroom D-3]] | [[Image:Nitrideetch.JPG|300x300px|thumb|The 'Nitride etch' bath is placed inside 'Wet bench 02: Nitride ethc' in Cleanroom D-3]] | ||