Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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# In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | # In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ||
# During the reminder of the cycle the platen power is kept constant at 45 W. | # During the reminder of the cycle the platen power is kept constant at 45 W. | ||
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