Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 9: | Line 9: | ||
! Thermal evaporation (Wordentec) | ! Thermal evaporation (Wordentec) | ||
|- | |- | ||
| | | Batch size | ||
| | | | ||
*Up to 1x4" wafers | *Up to 1x4" wafers | ||