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Specific Process Knowledge/Etch/Etching of Silicon/Si etch using ASE: Difference between revisions

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Line 110: Line 110:
! Process time  
! Process time  
| 54:10 mins
| 54:10 mins
! C<sub>4</sub>F<sub>4</sub> Flow
! C<sub>4</sub>F<sub>8</sub> Flow
| 0 sccm
| 0 sccm
| 120 sccm
| 120 sccm
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