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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Line 57: Line 57:
! Dep
! Dep
|-
|-
! Temperature
! Gas flow (sccm)
| 10<sup>o</sup>C
| SF<sub>6</sub> 350 (1.5 s) 550
! SF<sub>6</sub> Flow
| C<sub>4</sub>F<sub>8</sub> 200
| 260 sccm
| SF<sub>6</sub> 350 (1.5 s) 550
| 0 sccm
| C<sub>4</sub>F<sub>8</sub> 200
|-
|-
! No. of cycles
! Cycle time (secs)
| 31
| 7.0
! O<sub>2</sub> Flow
| 4.0
| 26 sccm
| 7.0
| 0 sccm
| 4.0
|-
|-
! Process time
! Pressure (mtorr)
| 5:56 mins
| 25 (1.5 s) 90 >> 150
! C<sub>4</sub>F<sub>4</sub> Flow
| 25
| 0 sccm
| 25 (1.5 s) 150
| 120 sccm
| 25
|-
|-
! APC mode
! Coil power (W)
| manual
| 2800
! RF coil
| 2000
| 2800 W
| 2800
| 1000 W
| 2000
|-
|-
! APC setting
! Platen power (W)
| 86.8 %
| 120 >> 140 (1.5) 45
! RF Platen
| 0
| 16 W
| 140 (1.5) 45
| 0 W
| 0  
|-
|-
!
! Time (mm:ss)
|
|  
! Cycle time
| Cycle time
| 6.5 s
| 6.5 s
| 5 s
| 5 s
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