Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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|+ '''Process A''' | |+ '''Process A''' | ||
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! colspan="2" align="center"| | ! - | ||
! colspan=" | ! colspan="2" align="center"| Step 1 | ||
! colspan="2" align="center"| Step 2 | |||
|- | |- | ||
! Parameter | ! Parameter | ||