Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

Jml (talk | contribs)
Jml (talk | contribs)
Line 41: Line 41:


{| border="2" cellpadding="2" cellspacing="1"  
{| border="2" cellpadding="2" cellspacing="1"  
|+ '''The shallolr recipe'''
|+ '''Process A'''
|-
|-
! colspan="2" align="center"| Common parameters
! colspan="2" align="center"| Common parameters