Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
Appearance
| Line 41: | Line 41: | ||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ ''' | |+ '''Process A''' | ||
|- | |- | ||
! colspan="2" align="center"| Common parameters | ! colspan="2" align="center"| Common parameters | ||