Specific Process Knowledge/Thin film deposition/Deposition of MgO: Difference between revisions

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-The characterization reveals a complex structure of the deposited layers. The best way to describe the samples is to implement the following model (shown in a figure). The MgO film contains a bottom intermediate layer with constant and relatively high electron density. On top of it, there is a main layer of MgO, where the density is a linear function of the depth. The highest density is on the bottom and the lowest at the top. The topmost layer contains moisture, where MgO bounds carbon and water.
+The characterization reveals a complex structure of the deposited layers. The best way to describe the samples is to implement the following model (shown in a figure). The MgO film contains a bottom intermediate layer with constant and relatively high electron density. On top of it, there is a main layer of MgO, where the density is a linear function of the depth. The highest density is on the bottom and the lowest at the top. The topmost layer contains moisture, where MgO binds carbon and water.
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-Appling this complexity allows fitting XRR data. Additionally, such structure is also supported by XPS analysis, where the chemical shifts of Mg-1s and O-1s support the idea.
+Appling this complexity allows fitting XRR data. Additionally, this structure is also supported by XPS analysis, where the chemical shifts of Mg 1s and O 1s support the idea.
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-The deposition rate derived from the XRR analysis illustrated in a figure is based on the thickness measurements which include the bottom intermediate layer, main layer, and moisture. This is the more reliable way of the procedure. Ellipsometry cannot take care of such complexity and ellipsometric measurement should only be used as a guide.
+The deposition rate derived from the XRR analysis, as illustrated in the figure, is based on thickness measurements that include the bottom intermediate layer, main layer, and moisture. This is a more reliable way of the procedure. Ellipsometry cannot take care of such complexity and ellipsometric measurement should only be used as a guide.
-<gallery caption="Figure 1. Deposition rate and ssample modeling." widths="500px" heights="400px" perrow="2">
+<gallery caption="Figure 1. Deposition rate and sample modeling." widths="400px" heights="350px" perrow="2">
 image:eves_MgO_deposition_rate_XRR_20220105.png| Deposition rate measured by ellipsometry and X-ray Reflectivity analysis.
 image:eves_MgO_XRR_XPS_model_20220105.png|MgO sample model.