Specific Process Knowledge/Thin film deposition/Deposition of Germanium: Difference between revisions
| Line 7: | Line 7: | ||
==Resistive Thermal evaporation== | ==Resistive Thermal evaporation== | ||
* [[/Thermal Ge evaporation Thermal Evaporator|Resistive thermal evaporation of Ge in Thermal Evaporator - Lesker]] | * [[/Thermal Ge evaporation Thermal Evaporator|Resistive thermal evaporation of Ge in Thermal Evaporator - Lesker]] | ||
Some very instrument specific deposition parameters for a now-decommissioned tool can be found here: * [[/Thermal Ge deposition Wordentec|Thermal deposition of Ge in Wordentec]] | |||
==Ge deposition equipment comparison== | ==Ge deposition equipment comparison== | ||