Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
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*Up to 4x6" wafers or | *Up to 4x6" wafers or | ||
*Up to 3x8" wafers | *Up to 3x8" wafers | ||
or | |||
*smaller pieces | *smaller pieces | ||
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'''**''' ''For thicknesses above 200 nm please get permission from ThinFilm group by writing to metal@nanolab.dtu.dk'' | '''**''' ''For thicknesses above 200 nm please get permission from ThinFilm group by writing to metal@nanolab.dtu.dk'' | ||