Specific Process Knowledge/Thin film deposition/Deposition of Niobium: Difference between revisions
Appearance
mNo edit summary |
|||
| Line 1: | Line 1: | ||
= Deposition of Nb = | |||
Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment. | Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment. | ||