Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty: Difference between revisions
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==Total Uncertainty for steps > 1 µm== | |||
[[File:Error probability distributions rev.png|upright=2|400px|alt=Four different probability distributions that contribute to the total error on measurements with the Dektak XTA 6.5 micron range. By far the widest distribution is the one from the error on the standard step, which is a Gaussian. The others are the non-Gaussian spread of the average measurement of the standard height, which cuts off at the QC limits, the resolution, which is a very narrow uniform distribution, and the spread of measurement values for a given step being measured, which is a Gaussian whose width depends on the step in question. Note this figure was made when the best estimate of the true standard size was 917 +/- 17 nm; it is recalibrated every 5 years and has been 916-923 nm over the years, with a 95 % CI of approx. 18 nm|right|thumb|Figure 2: The probability distributions of the main sources of error are convoluted to create the total error on a profiler measurement.]] | [[File:Error probability distributions rev.png|upright=2|400px|alt=Four different probability distributions that contribute to the total error on measurements with the Dektak XTA 6.5 micron range. By far the widest distribution is the one from the error on the standard step, which is a Gaussian. The others are the non-Gaussian spread of the average measurement of the standard height, which cuts off at the QC limits, the resolution, which is a very narrow uniform distribution, and the spread of measurement values for a given step being measured, which is a Gaussian whose width depends on the step in question. Note this figure was made when the best estimate of the true standard size was 917 +/- 17 nm; it is recalibrated every 5 years and has been 916-923 nm over the years, with a 95 % CI of approx. 18 nm|right|thumb|Figure 2: The probability distributions of the main sources of error are convoluted to create the total error on a profiler measurement.]] | ||
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==Total Uncertainty for steps < 1 µm== | |||