Specific Process Knowledge/Characterization/Dektak XTA: Difference between revisions

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 |style="background:LightGrey; color:black"|Scan range x y
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-Line scan x: 50 µm to 55 mm in a single scan, up to 200 mm with stiching
+* Line scan: 50 µm to 55 mm in a single scan
+* Up to 200 mm with stiching
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 |style="background:LightGrey; color:black"|Scan range z
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 |style="background:LightGrey; color:black"|Resolution x y
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-Down to 0.003 µm theoretically, in practice limited by the tip radius
+Down to 0.003 µm theoretically, in practice limited by tip radius
 |-
 |style="background:LightGrey; color:black"|Resolution z
 |style="background:WhiteSmoke; color:black"|
-Å, 10 Å, 80 Å or 160 Å (for ranges 65 kÅ, 655 kÅ, 5240 kÅ and 1 mm respectively)
+Å, 10 Å, 80 Å or 160 Å for ranges 65 kÅ, 655 kÅ, 5240 kÅ and 1 mm respectively
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 |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
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-~ 2 % for a 1 µm step with the smallest measurement range and ~ 1 % for a 25 µm step ''for well-defined steps that are easy to measure.'' [[Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty|More info here]]
+*~ 2 % for a 1 µm step with the 65 kÅ range
+*~ 1 % for a 25 µm step
+*''for well-defined steps that are easy to measure.''
+*[[Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty|More info here]]
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 |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
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 | style="background:LightGrey; color:black"|Substrate materials allowed
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-*All materials that do not stick to the tip or leave residues on the chuck
+*All materials that do not stick to the tip or leave residues
 *For very soft polymers we recommend the [[Specific Process Knowledge/Characterization/Topographic measurement#Comparison of Stylus Profilers, Optical Profilers and AFMs at Nanolab| Dektak 150]].
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