Jump to content

Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions

← Older editNewer edit →
VisualWikitext
Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,736 edits
Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,736 edits
Line 18: Line 18:
*Vendor's description of [https://labmanager.dtu.dk/view_binary.php?fileId=6385 instrument specs including reproducibility and flatness of scans] (''requires login as it seems not freely available from vendor's website'')
*Vendor's description of [https://labmanager.dtu.dk/view_binary.php?fileId=6385 instrument specs including reproducibility and flatness of scans] (''requires login as it seems not freely available from vendor's website'')
*Using the analysis software: [[Specific Process Knowledge/Characterization/Tencor P17#Apex Software for Data Analysis|Apex software access & tips]]
*Using the analysis software: [[Specific Process Knowledge/Characterization/Tencor P17#Apex Software for Data Analysis|Apex software access & tips]]
*Vendor's document on 2D stress measurements (also somewhat informative for 3D stress measurements) including info on the automatic fitting to calculate the local radius of the wafer: [https://www.kla.com/wp-content/uploads/KLA_AppNote_Stylus_2D_Stress.pdf].  
*[https://www.kla.com/wp-content/uploads/KLA_AppNote_Stylus_2D_Stress.pdf Vendor's document on 2D stress measurements (also somewhat informative for 3D stress measurements)] including info on the automatic fitting to calculate the local radius of the wafer.
*Tips on making [https://labmanager.dtu.dk/view_binary.php?fileId=5543 2D stress measurements] ''(requires login)''.  Most users will make 3D stress measurement as described in the regular Nanolab manual for the P17 in LabManager. It counts as "3D" if you wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan - the software does not allow rotation of the stage for this type of scan.
*Tips on making [https://labmanager.dtu.dk/view_binary.php?fileId=5543 2D stress measurements] ''(requires login)''.  Most users will make 3D stress measurement as described in the regular Nanolab manual for the P17 in LabManager. It counts as "3D" if you wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan - the software does not allow rotation of the stage for this type of scan.
<br>
<br>
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17"