Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
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TiAu or CrAu is tested approximately once a month on both of Nanolab's e-beam evaporators. | |||
'''You can find the QC procedures and data in LabManager here''' (requires login): | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure, E-beam Evaporator (Temescal)]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 Newest QC data, E-beam Evaporator (Temescal)]<br> | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure, E-beam Evaporator (10-pockets)]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 Newest QC data, E-beam Evaporator (10-pockets)]<br> | |||
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! QC Recipe: | ! QC Recipe: | ||
! Standard recipes/TiAu or Cr/Au | ! Standard recipes/TiAu or Cr/Au | ||
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{| border="2" cellspacing="1" cellpadding="2" align=" | {| border="2" cellspacing="1" cellpadding="2" align="left" style="width:400px" | ||
!QC limits | !QC limits | ||
!Both e-beam evaporators | !Both e-beam evaporators | ||
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Thickness is measured in 5 points with a stylus profiler. <br> | Thickness is measured in 5 points with a stylus profiler. <br> | ||
Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au or Cr/Au films. | Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au or Cr/Au films. | ||
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